|
KMID : 0381919990290020255
|
|
Korean Journal of Microscopy
1999 Volume.29 No. 2 p.255 ~ p.263
|
|
|
Interfacial Reactions of Co/Ti Multilayer System
|
|
Lee Sang-Hoon
Park Se-Jun
Ko Dae-Hong
|
|
|
Abstract
|
|
|
|
We have investigated the interfacial reactions in Co/Ti multilayer thin films prepared by DC Magnetron sputtering system. We observed that the amorphous Co-Ti phase formed by SSAR (Solid State Amorphization Reaction) upon annealing at $200^{\circ}C$. Upon annealing treatments at $300^{\circ}C\;and\;400^{\circ}C$, a crystalline phase of CoTi formed at the Co/Ti interface. The sheet resistance of Co/Ti multilayer thin film increased by the formation of the amorphous phase at the Co/Ti interface, which decreased by the formation of new crystalline compound CoTi.
|
|
|
KEYWORD
|
|
|
Multilayer, SSAR, Interfacial reaction, Microstructure
|
|
|
FullTexts / Linksout information
|
|
|
|
|
Listed journal information
|
|
|